Nonvolatile semiconductor memory device

ABSTRACT

A nonvolatile semiconductor memory device comprises a cell array including plural MATs (unit cell arrays) arranged in matrix, each MAT containing a plurality of first lines, a plurality of second lines intersecting the plurality of first lines, and a plurality of memory cells connected at intersections of the first and second lines between both lines, each memory cell containing an electrically erasable programmable variable resistive element of which resistance is nonvolatilely stored as data; and a plurality of write/erase circuits connected to the MATs and operative to execute data write or erase to the memory cells inside the MATs in accordance with input data. A part of the plurality of write/erase circuits writes data to memory cells inside a corresponding MAT while another part of the plurality of write/erase circuits erases data from memory cells inside a corresponding MAT at the same time.

CROSS-REFERENCE TO RELATED APPLICATION

This application is based upon and claims the benefit of priority fromthe prior Japanese Patent Application No. 2008-197608, filed on Jul. 31,2008, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a nonvolatile semiconductor memorydevice using a variable resistive element of which resistance is storedas data.

2. Description of the Related Art

Electrically erasable programmable nonvolatile memories include a flashmemory as well known in the art, which comprises a cell array ofNAND-connected or NOR-connected memory cells having a floating gatestructure. A ferroelectric memory is also known as a nonvolatile fastrandom access memory.

On the other hand, technologies of pattering memory cells much finerinclude a resistance variable memory, which uses a variable resistiveelement in a memory cell as proposed. Known examples of the variableresistive element include a phase change memory device that varies theresistance in accordance with the variation in crystal/amorphous statesof a chalcogenide compound; an MRAM device that uses a variation inresistance due to the tunnel magneto-resistance effect; a polymerferroelectric RAM (PFRAM) memory device including resistive elementsformed of a conductive polymer; and a ReRAM device that causes avariation in resistance on electrical pulse application (Patent Document1: JP 2006-344349A, paragraph 0021).

The resistance variable memory may configure a memory cell with a serialcircuit of a Schottky diode and a resistance variable element in placeof the transistor. Accordingly, it can be stacked easier andthree-dimensionally structured to achieve much higher integration as anadvantage (Patent Document 2: JP 2005-522045A).

The methods of writing data to such the resistance variable memoryinclude one, which comprises once clearing all memory cells. This methodhas an advantage because it is sufficient to write data only to thememory cell of question without the need for considering data storedimmediately before. This method, however, can not allow the resistancevariable memory to sufficiently exert the performance of the operatingspeed.

SUMMARY OF THE INVENTION

In an aspect the present invention provides a nonvolatile semiconductormemory device, comprising: a cell array including plural MATs (unit cellarrays) arranged in matrix, each MAT containing a plurality of firstlines, a plurality of second lines intersecting said plurality of firstlines, and a plurality of memory cells connected at intersections ofsaid first and second lines between both lines, each memory cellcontaining an electrically erasable programmable variable resistiveelement of which resistance is nonvolatilely stored as data; and aplurality of write/erase circuits connected to said MATs and operativeto execute data write or erase to said memory cells inside said MATs inaccordance with input data. A part of said plurality of write/erasecircuits writes data to memory cells inside a corresponding MAT whileanother part of said plurality of write/erase circuits erases data frommemory cells inside a corresponding MAT at the same time.

In another aspect the present invention provides a nonvolatilesemiconductor memory device, comprising: a cell array including Nm MATs(unit cell arrays) (Nm=an integer of 1 or more) arranged in matrix, eachMAT containing Na first lines (Na=an integer of 1 or more), Nb secondlines (Nb=an integer of 1 or more) intersecting said Na first lines, anda plurality of memory cells connected at intersections of said first andsecond lines between both lines, each memory cell containing a serialcircuit of an electrically erasable programmable variable resistiveelement of which resistance is nonvolatilely stored as data and anon-ohmic element; and a plurality of write/erase circuits connected tosaid MATs and operative to execute data write or erase to said memorycells inside said MATs in accordance with input data. A memory cellconnected to an a-th first line (a=an integer of 1 to Na) and a b-thsecond line (b=an integer of 1 to Nb) in an m-th one of said MATs (m=aninteger of 1 to Nm) has a logical address i={(a−1)Nb+(b−1)}Nm+(m−1). Atthe time of data write/erase to a j-th page (j=an integer of 1 to Na×Nb)composed of Nm memory cells having logical addresses Nm(j−1) throughNm(j−1)+(Nm−1), an m1-th one of said write/erase circuits (m1=an integerof 1 to Nm) writes data to said memory cell having the logical addressNm(j−1)+(m1−1) while an m2-th one of said write/erase circuits (m2=aninteger of 1 to Nm except ml) erases data from said memory cell havingthe logical address Nm(j−1)+(m2−1) at the same time.

In yet another aspect the present invention provides a nonvolatilesemiconductor memory device, comprising: a cell array including aplurality of first lines, a plurality of second lines intersecting saidplurality of first lines, and a plurality of memory cells arranged inmatrix and connected at intersections of said first and second linesbetween both lines, each memory cell containing a serial circuit of anelectrically erasable programmable variable resistive element of whichresistance is nonvolatilely stored as data and a non-ohmic element; anda plurality of write/erase circuits operative to execute data write orerase to said memory cells in accordance with input data. A certain oneof said write/erase circuits writes data to a certain one of said memorycells while another one of said write/erase circuits erases data fromanother one of said memory cells physically separated from said certainmemory cells at the same time.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram of a nonvolatile memory according to a firstembodiment of the present invention.

FIG. 2 is a perspective view showing part of a MAT in the nonvolatilememory according to the same embodiment.

FIG. 3 is a cross-sectional view of one memory cell taken along I-I′line and seen from the direction of the arrow in FIG. 2.

FIG. 4 is a schematic cross-sectional view showing an example of thevariable resistive element in the same embodiment.

FIG. 5 is a diagram showing a circuit in the MAT and voltages suppliedto lines at the time of “1” write in the same embodiment.

FIG. 6 is a diagram showing a circuit in the MAT and voltages suppliedto lines at the time of “0” write in the same embodiment.

FIG. 7 is a brief view showing a page configuration in a cell array inthe same embodiment.

FIG. 8 is a block diagram of the cell array in the same embodiment.

FIG. 9 is a block diagram showing part of the function of a row controlcircuit in the same embodiment.

FIG. 10 is a diagram showing a circuit in the MAT and voltages suppliedto lines at the time of “1” write in the same embodiment.

FIG. 11A shows a diagram of operating waveforms in each MAT at the timeof “0” write in the same embodiment.

FIG. 11B shows a diagram of operating waveforms in each MAT at the timeof “1” write in the same embodiment.

FIG. 12 is a block diagram showing part of the function of the rowcontrol circuit in the same embodiment.

FIG. 13 is a flowchart showing data write processing in a nonvolatilememory according to a second embodiment of the present invention.

FIG. 14 is a block diagram showing part of a cell array in a nonvolatilememory according to a third embodiment of the present invention.

FIG. 15A shows a diagram of operating waveforms in each MAT at the timeof “0” write in a nonvolatile memory according to a fourth embodiment ofthe present invention.

FIG. 15B shows a diagram of operating waveforms in each MAT at the timeof “1” write in the same embodiment.

FIG. 16A is a diagram showing a circuit in the MAT and voltages suppliedto lines at the time of “0” write in the same embodiment.

FIG. 16B is a diagram showing a circuit in the MAT and voltages suppliedto lines at the time of “1” write in the same embodiment.

FIG. 17A shows a diagram of operating waveforms in each MAT at the timeof “0” write in a nonvolatile memory according to a fifth embodiment ofthe present invention.

FIG. 17B shows a diagram of operating waveforms in each MAT at the timeof “1” write in the same embodiment.

FIG. 18 is a diagram showing a circuit in the MAT and voltages suppliedto lines at the time of “1” write in the same embodiment.

DETAILED DESCRIPTION OF THE EMBODIMENTS

The embodiments associated with the nonvolatile memory according to thepresent invention will now be described in detail with reference to thedrawings.

First Embodiment

FIG. 1 is a block diagram of a nonvolatile memory according to a firstembodiment of the present invention.

The nonvolatile memory comprises a plurality of MATs (unit cell arrays)1, which are arranged in matrix and each use resistance variableelements as memory cells, as in a later-described ReRAM (Resistive RAM)and so forth. It also comprises a plurality of write/erase circuits eachincluding a column control circuit 2 and a row control circuit 3. Thecolumn control circuit 2 is operative to control bit lines BL in the MAT1 and execute erasing data from the memory cells, writing data to thememory cells, and reading data out of the memory cells. The row controlcircuit 3 is operative to select from among word lines WL in the MAT 1and apply voltages required for erasing data from the memory cells,writing data to the memory cells, and reading data out of the memorycells.

A data I/O buffer 4 is connected to an external host, not shown, via anI/O line to receive write data, receive erase instructions, provide readdata, and receive address data and command data.

The data I/O buffer 4 sends received write data to the column controlcircuit 2 and receives read-out data from the column control circuit 2and provides it to external. An address fed from external to the dataI/O buffer 4 is sent via an address register 5 to the column controlcircuit 2 and the row control circuit 3. A command fed from the host tothe data I/O buffer 4 is sent to a command interface 6. The commandinterface 6 receives an external control signal from the host anddecides whether the data fed to the data I/O buffer 4 is write data, acommand or an address. If it is a command, then the command interfacetransfers it as a received command signal to a controller 7. Thecontroller 7 manages the entire nonvolatile memory to receive commandsfrom the host, and executes read, write, erase, and data I/O management.The external host can also receive status information managed by thecontroller 7 and decide the operation result. The status information isalso utilized in control of write and erase.

The controller 7 controls the pulse generator 8. Under this control, thepulse generator 8 is allowed to provide a pulse of any voltage andtiming. The pulse formed herein can be transferred to any line selectedby the column control circuit 2 and the row control circuit 3.

Peripheral circuit elements other than the MATs 1 can be formed in a Sisubstrate immediately beneath the MATs 1 formed in a wiring layer. Thus,the chip area of the nonvolatile memory can be made almost equal to atotal area of the plural MATs 1.

FIG. 2 is a perspective view of part of the MAT 1, and FIG. 3 is across-sectional view of one memory cell taken along I-I′ line and seenin the direction of the arrow in FIG. 2.

There are plural first lines or word lines WL0-WL2 disposed in parallel,which cross plural second lines or bit lines BL0-BL2 disposed inparallel. A memory cell MC is arranged at each intersection of bothlines as sandwiched therebetween. Desirably, the word lines WL and thebit lines BL are composed of heat-resistive low-resistance material suchas W, WSi, NiSi, CoSi.

The memory cell MC comprises a serial connection circuit of a variableresistive element VR and a non-ohmic element NO as shown in FIG. 3.

The variable resistive element VR can vary the resistance with current,heat, or chemical energy on voltage application. Arranged on an upperand a lower surface thereof are electrodes EL1, EL2 serving as a barriermetal layer and an adhesive layer. Material of the electrodes mayinclude Pt, Au, Ag, TiAlN, SrRuO, Ru, RuN, Ir, Co, Ti, TiN, TaN, LaNiO,Al, PtIrO_(x), PtRhO_(x), Rh/TaAlN. A metal film capable of achievinguniform orientation may also be interposed. A buffer layer, a barriermetal layer and an adhesive layer may further be interposed.

Available examples of the variable resistive element VR include: onethat changes the resistance in accordance with a phase change betweenthe crystalline state and the amorphous state, such as a chalcogenide(PCRAM); one that changes the resistance by precipitating metal cationsto form a bridge (conducting bridge) between electrodes and ionizing theprecipitated metal to destruct the bridge (CBRAM); and one that changesthe resistance by applying a voltage or current (ReRAM) although thereis no agreed theory (the factors in the resistance variation are roughlydivided into two: one that causes a variation in resistance inaccordance with the presence/absence of charge trapped in charge trapspresent in the electrode interface; and one that causes a variation inresistance in accordance with the presence/absence of the conductionpath due to an oxygen loss and so forth).

FIG. 4 shows an example of the ReRAM. The variable resistive element VRshown in FIG. 4 includes a recording layer 12 arranged between electrodelayers 11, 13. The recording layer 12 is composed of a compositecompound containing at least two types of cation elements. At least oneof the cation elements is a transition element having the d-orbitincompletely filled with electrons, and the shortest distance betweenadjacent cation elements is 0.32 nm or lower. Specifically, it isrepresented by a chemical formula A_(x)M_(y)X_(z) (A and M are differentelements) and may be formed of material having a crystal structure suchas a spinel structure (AM₂O₄), an ilmenite structure (AMO₃), adelafossite structure (AMO₂), a LiMoN₂ structure (AMN₂), a wolframitestructure (AMO₄), an olivine structure (A₂MO₄), a hollandite structure(A_(x)MO₂), a ramsdellite structure (A_(x)MO₂), and a perovskitestructure (AMO₃).

In the example of FIG. 4, A comprises Zn, M comprises Mn, and Xcomprises O. In the recording layer 12, a small white circle representsa diffused ion (Zn), a large white circle represents an anion (O), and asmall black circle represents a transition element ion (Mn). The initialstate of the recording layer 12 is the high-resistance state. When theelectrode layer 11 is kept at a fixed potential and a negative voltageis applied to the electrode layer 13, part of diffused ions in therecording layer 12 migrate toward the electrode layer 13 to reducediffused ions in the recording layer 12 relative to anions. The diffusedions arrived at the electrode layer 13 accept electrons from theelectrode layer 13 and precipitate as a metal, thereby forming a metallayer 14. Inside the recording layer 12, anions become excessive andconsequently increase the valence of the transition element ion in therecording layer 12. As a result, the carrier injection brings therecording layer 12 into electron conduction and thus completes setting.On regeneration, a current may be allowed to flow, of which value isvery small so that the material configuring the recording layer 12causes no resistance variation. The programmed state (low-resistancestate) may be reset to the initial state (high-resistance state) bysupplying a large current flow in the recording layer 12 for asufficient time, which causes Joule heating to facilitate the oxidationreduction reaction in the recording layer 12. Application of an electricfield in the opposite direction from that at the time of setting mayalso allow resetting.

The non-ohmic element NO may include various diodes such as a Schottkydiode, a PN-junction diode, a PIN diode, and may have a MIM(Metal-Insulator-Metal) structure, and a SIS (Silicon-Insulator-Silicon)structure. In this case, electrodes EL2, EL3 forming a barrier metallayer and an adhesive layer may be interposed. If a diode is used, fromthe property thereof, it can perform the unipolar operation. In the caseof the MIM structure or SIS structure, it can perform the bipolaroperation. The non-ohmic element NO and the variable resistive elementVR may be placed in the opposite relation to that in FIG. 3. Thenon-ohmic element NO may be reversed in polarity.

The following description is given on the assumption that thehigh-resistance state of the resistance states of the variable resistiveelement VR defines data “1” and the low-resistance state defines data“0”. In addition, writing or setting may also be represented by “0”writing” while erasing or resetting may be represented by “1” writing”as well.

Data writing in the present embodiment is described next.

FIGS. 5 and 6 are circuit diagrams of the MAT 1.

The MAT 1 includes, for example, 1024 word lines WL and, for example,512 bit lines BL crossing these word lines WL. There are 1024×512intersections of the lines, at which connected are memory cells MC eachincluding the non-ohmic element NO or a diode Di having an anodeconnected to the word line WL, and the variable resistive element VRconnected between the cathode of the diode Di and the bit line BL. Thesize of the MAT 1 can be determined arbitrarily in consideration ofvoltage drops on the word line WL and the bit line BL, CR delays,processing speeds of data writing, and so forth. For example, other thanthe MAT 1 shown in FIG. 5, the MAT has an arbitrarily selected size suchas 1024×2048.

With regard to the MAT 1 thus configured, a specific example isdescribed on writing “0” to the memory cell MC1 and “1” to other memorycells MC.

First, as the method of writing data to such the MAT 1, a method isconsidered, which comprises once clearing (resetting) all memory cellsMC in the MAT 1 to “1”. This method has an advantage because it issufficient to write only “0” input data without the need for consideringdata stored immediately before.

Resetting all memory cells MC in the MAT 1 is processed at a certainnumber of memory cells MC connected to one word line WL, in the case ofFIG. 5, taking heat production from the MAT 1 into account. As aspecific example, a method is described, which comprises clearing memorycells MC1-MC3 connected to a word line WL1, surrounded by the dottedline in FIG. 5, to “1”.

In this case, the row control circuit 3 supplies a word line resetvoltage Vresetwl (of 1 V, for example) to the word line WL1, and thecolumn control circuit 3 supplies a bit line reset voltage Vresetbl (of0 V, for example) to the bit lines BL1-BL3. As a result, in the memorycells MC1-MC3, the diode Di is forward biased and the variable resistiveelement VR makes a transition to the high-resistance state. On the otherhand, the row control circuit 3 supplies a word line non-selectionvoltage Vnswl (of 0 V, for example) to the word lines WL2, WL3 connectedto other memory cells MC. As a result, in the other memory cells MC, thediode Di is reverse biased and the variable resistive element VR makesno transition in the resistance state. Thus, the memory cells MC1-MC3are cleared to “1”. Through repetitions of the above over all the wordlines WL, all the memory cells can be cleared to “1”.

If it is not required to consider heat production from the memory cellsMC at the time of reset, supplying a word line reset voltage Vresetwl(of 3 V, for example) to all the word lines WL makes it possible toreset the entire MAT 1 in batch. In this case, the length of time can bemade shorter than when each word line WL is individually cleared to “1”.

In the following description, a set of plural memory cells MC processedin batch, like the memory cells MC1-MC3 cited in the above specificexample, may also be represented by a “page”.

Next, “0” is written to the memory cell MC1.

In this case, the row control circuit 3 supplies a word line set voltageVsetwl (of 3 V, for example) to the word line WL1, and the columncontrol circuit 3 supplies a bit line set voltage Vsetbl (of 0V, forexample) to the bit line BL connected to the memory cell MC1. On theother hand, it supplies a word line non-selection voltage Vnswl (of 0 V,for example) and a bit line non-selection voltage Vnsbl (of 3 V, forexample) to the word lines WL and bit lines BL connected to other memorycells MC, respectively. As a result, in the memory cell MC1, the diodeDi is forward biased and the variable resistive element VR makes atransition to the low-resistance state. On the other hand, in the othermemory cells MC, the diode Di is reverse biased and the variableresistive element VR makes no transition in the resistance state,thereby writing “0” only to the memory cell MC1.

Thus, “0” can be written to the memory cell MC1 and “0” to the othermemory cells MC.

This method, however, requires once clearing all the memory cells MCwith “1”, which extends the processing time correspondingly as aproblem. In this data writing method, the memory cells MC contained inone page are arranged closely. Accordingly, heat production from one ofthe diode Di and the variable resistive element VR in each memory cellMC mutually influences on the other and becomes a factor that makes theoperation unstable.

Therefore, the present embodiment selects one memory cell MC from eachMAT 1 and writes data “0” or “1” to the memory cells MC contained in apage surrounded by the dotted line in the figure at the same time asshown in FIG. 7.

Thus, the length of time required for data write processing can be madeshorter than the cases in FIGS. 5 and 6 because no reset is requiredprior to data write. Further, plural memory cells MC contained in a pageare arranged separately from each other and accordingly the influence byheat production from the memory cells MC can be relieved at the time ofdata writing.

FIG. 8 is a block diagram of the cell array in the present embodiment,in which a reference numeral surrounded by a blank circle denotes alogical address assigned to each memory cell MC.

The cell array in FIG. 8 is divided into 4 rows in the x direction alongwhich the word line WL extends and 3 columns in the y direction alongwhich the bit line BL extends, and thus 12 MATs 1 in total. Thefollowing description is given on the assumption that the MATs 1 locatedon the upper stage in FIG. 8 are denoted with MATs #0, #1, #2, #3 fromthe left, the MATs 1 located on the middle stage with MATs #4, #5, #6,#7 from the left, and the MATs 1 located on the lower stage with MATs#8, #9, #10, #11. Each MAT 1 is provided with a column control circuit 2and a row control circuit 3. Such column control circuits 2 and rowcontrol circuits 3 are supplied with various voltages required for datawrite/read from the pulse generator 8 shown in FIG. 1.

The column control circuits 2 in the MATs #0, #4, #8 aligned in the ydirection are connected via transfer transistors T0, T4, T8 to an IO pad0. Similarly, the column control circuits 2 in the MATs #1, #5, #9 areconnected via transfer transistors T1, T5, T9 to an IO pad 1, the columncontrol circuits 2 in the MATs #2, #6, #10 are connected via transfertransistors T2, T6, T10 to an IO pad 2, and the column control circuits2 in the MATs #3, #7, #11 are connected via transfer transistors T3, T7,T11 to an IO pad 3, respectively.

The transfer transistors T0-T3 aligned in the x direction haverespective gates, which are supplied with a common input data selectionsignal IDST0. Similarly, the transfer transistors T4-T7 and T8-T11 haverespective gates, which are supplied with common input data selectionsignals IDST1 and IDST2, respectively. The input data selection signalsIDST0-2 are signals determined on the basis of input addresses.

Further, the row control circuit 3 in each MAT 1 includes a multiplexercircuit 15, that is, the selection circuit shown in FIG. 9. Themultiplexer circuit 15 is operative to select one of the word line setvoltage Vsetwl and the word line reset voltage Vresetwl fed from thepulse generator 8 to the row control circuit 3 and supply the selectedone to a selected word line WL. The supply of either voltage isdetermined by input data DIN. Specifically, the word line set voltageVsetwl is supplied to the selected word line WL if the input data is “0”while the word line reset voltage Vresetwl to the selected word line WLif the input data is “1”.

The column control circuit 2 in each MAT 1 includes a similar circuit tothat in FIG. 9. The multiplexer circuit contained in the column controlcircuit 2 is operative to select one of the bit line set voltage Vsetbland the bit line reset voltage Vresetbl fed from the pulse generator 8to the column control circuit 2 and supply the selected one to theselected word line WL.

The following description is given to assignment of logical addresses tothe memory cells MC contained in the cell array.

A logical address i is assigned to a memory cell MC, which adjacentlylocates on the right of a memory cell MC at a logical address i−12 andbelow a memory cell MC at i−6144 (in the case of 512 bit lines BL). Amemory cell MC locating at the upper left corner in a MATm is assignedwith a logical address m. In the MAT #2, for example, memory cells MClocating at the upper left corner, the upper right corner, the lowerleft corner, and the lower right corner are assigned with logicaladdresses #2, #6134, #6285314, and #6291446, respectively (in the caseof 1024 word lines WL and 512 bit lines BL).

There are 12 MATs and one memory cell MC is selected from every MAT 1 sothat memory cells MC contained in one page are 12 in number. Therefore,a j-th page contains memory cells MC at logical addresses 12×(j−1)through 12×(j−1)+11. For example, the second page contains 12 memorycells MC at logical addresses #12-#23.

In general, in the case where the number of MATs is Nm (Nm=an integer of1 or more), the number of word lines WL in each MAT is Na (Na=an integerof 1 or more), and the number of bit lines BL is Nb (Nb=an integer of 1or more), a memory cell connected to an a-th word line WL (a=an integerof 1 to Na) and a b-th bit line BL (b=an integer of 1 to Nb) has alogical address i, which can be represented by {(a−1)Nb+(b−1)}Nm+(m−1).In this case, a j-th page (j=an integer of 1 to Na×Nb) is composed of Nmmemory cells at logical addresses Nm(j−1) through Nm(j−1)+(Nm−1).

Writing data to such the cell array is described next.

Initially, input data fed from external is transferred to the columncontrol circuit 2 contained in each MAT 1 via the IO pad. Theconfiguration of FIG. 8 includes 4 IO pads. Accordingly, when input datais transferred to the column control circuits 2 contained in all the 12MATs 1, the input data is divided into 3 pieces and these aretransferred at different times. Specifically, first 4 bits of the inputdata are prepared on the IO pads 0-3. Thereafter, the input dataselection signal IDST0 is activated (“H”) to turn on the transfertransistors T0-T3 to connect the IO pads 0-3 with the column controlcircuits 2 in the MATs #0-#3. Thus, the input data bits on the IO pads0-3 are transferred to the column control circuits 2 in the MATs #0-#3.Subsequently, next 4 bits of the input data are prepared on the IO pads0-3. Thereafter, the input data selection signal IDST1 is activated(“H”) to turn on the transfer transistors T4-T7 to connect the IO pads0-3 with the column control circuits 2 in the MATs #4-#7. Thus, theinput data bits on the IO pads 0-3 are transferred to the column controlcircuits 2 in the MATs #4-#7. Similarly, subsequent 4 bits of the inputdata are transferred to the column control circuits 2 in the MATs#8-#11. Thus, one bit of the input data can be prepared in the columncontrol circuits 2 in all the MATs 1. The input data selection signalsIDST0-2 are herein controlled such that they are activated sequentiallyat operation cycles.

In this state, data is written in selected memory cells MC in the MATs.

Subsequently, data writing in the MATs 1 is described.

A first description is given to the case where input data is “0”. Thevoltages supplied to the word lines WL and the bit lines BL in the MAT 1in this case are similar to those of FIG. 6.

The word line WL1 and the bit line BL1 connected to the memory cell MC1are supplied with the word line set voltage Vsetwl (of 3 V, for example)from the row control circuit 2 and the bit line set voltage Vsetbl (of 0V, for example) from the column control circuit 3, respectively. As aresult, the diode Di in the memory cell MC1 is forward biased and thevariable resistive element VR, if it is in the low-resistance state,still remains the low-resistance state while the variable resistiveelement VR, if it is in the high-resistance state, makes a transition tothe low-resistance state. On the other hand, the word lines WL and thebit lines BL connected to other memory cell MC are supplied with theword line non-selection voltage Vnswl (of 0 V, for example) from the rowcontrol circuit 3 and the bit line non-selection voltage Vnsbl (of 3 V,for example) from the column control circuit 2, respectively. As aresult, the diode Di in the memory cell MC is reverse biased and thevariable resistive element VR makes no transition in the resistancestate. Thus, “0” is written only in the memory cell MC1.

The following description using FIG. 10 is given to the case where inputdata is “1”.

The word line WL1 and the bit line BL1 connected to the memory cell MC1are supplied with the word line reset voltage Vresetwl (of 1 V, forexample) from the row control circuit 2 and the bit line reset voltageVresetbl (of 0 V, for example) from the column control circuit 3,respectively. As a result, the diode Di in the memory cell MC1 isforward biased and the variable resistive element VR, if it is in thehigh-resistance state, still remains the high-resistance state while thevariable resistive element VR, if it is in the low-resistance state,makes a transition to the high-resistance state. On the other hand, theword lines WL and the bit lines BL connected to other memory cell MC aresupplied with the word line non-selection voltage Vnswl (of 0 V, forexample) from the row control circuit 3 and the bit line non-selectionvoltage Vnsbl (of 1 V, for example) from the column control circuit 2,respectively. As a result, the diode Di in the memory cell MC1 isreverse biased and the variable resistive element VR makes no transitionin the resistance state. Thus, “1” is written only in the memory cellMC1.

The above data write can be executed over the MAT #0 through MAT #11 inbatch to complete data write in one page. Further, this processing canbe repeated over all pages to complete data write in the entire cellarray.

The following description is given to a control method in the case wherethe lengths of time of supplying voltages to the word line WL and thebit line BL at the time of “1” write are different from those at thetime of “0” write.

FIG. 11 shows operating waveforms in each MAT in this case; FIGS. 11Aand 11B relate to the cases of input data “0” and “1”, respectively.

In the example of FIG. 11, compared with the length of time of supplyingthe word line set voltage Vsetwl to the selected word line WL at thetime of “0” write, the length of time of supplying the word line resetvoltage Vresetwl to the selected word line WL at the time of “1” writeis longer by At for the following reason. Namely, in resetting, acurrent flow is supplied in the variable resistive element VR for aloner time to facilitate the oxidation reduction reaction by Jouleheating as described above.

In this case, a further multiplexer circuit 115 shown in FIG. 12 isadded at the rear stage of the multiplexer circuit 15.

The multiplexer circuit 115 is operative to select one of the word lineset voltage Vsetwl or the word line reset voltage Vresetwl fed from themultiplexer circuit 15 and a recovery voltage (of 0 V, for example) andsupply the selected one to the word line WL. The recovery voltage is avoltage supplied to the word line WL at the normal time after the wordline set voltage Vsetwl or the word line reset voltage Vresetwl issupplied for a certain time. The multiplexer circuit 115 is controlledby the output from a NOR gate G103, which receives the output from anAND circuit G101 and the output from an AND circuit G102. The ANDcircuit G101 receives a data identification signal DATA0 that is madeactive (“H”) in the case of input data “0”, and a clock count signalCLK10 that is made active (“H”) during the period of 10 clocks givenfrom the controller 7 shown in FIG. 1. The AND circuit G102 receives adata identification signal DATA1 that is made active (“H”) in the caseof input data “1”, and a clock count signal CLK100 that is made active(“H”) during the period of 100 clocks given from the controller 7 shownin FIG. 1. The clock count signal is a signal determined by the lengthsof time of supplying the word line set voltage Vsetwl and the word linereset voltage Vresetwl to the word line WL and the bit line BL at thetime of “0” and “1” write and the period of the clock given from thestate machine. In the example shown in FIG. 12, if the clock period is10 ns, the length of time of supplying the word line set voltage Vsetwlat the time of “0” write and the length of time of supplying the wordline reset voltage Vresetwl at the time of “1” write are 100 ns and 1μs, respectively. These lengths of supply time can be adjusted with theactive period of time in the clock count signal.

Subsequently, operation of the multiplexer circuit 115 is described.

In the case of input data “0”, the input In0 of the multiplexer circuit115 in FIG. 9 is supplied with the word line set voltage Vsetwl from themultiplexer circuit 15. In addition, the data identification signalDATA0 and the clock count signals CLK10, CLK100 become “H” (active) andthe data identification signal DATA1 becomes “L”. In this case, theoutput from the AND gate G101 becomes “H” and the output from the NORgate G103 becomes “L”. As a result, the selected word line WL issupplied with the word line set voltage Vsetwl. Thereafter, when 10pulses are supplied from the state machine, the clock count signal CLK10becomes “L”. Therefore, the output from the AND gate G101 becomes “L”and the output from the NOR gate G103 becomes “H”. As a result, theselected word line WL is supplied with the recovery voltage.

In the case of input data “1”, the input In0 of the multiplexer circuit115 is supplied with the word line reset voltage Vresetwl. In addition,the data identification signal DATA1 and the clock count signals CLK10,CLK100 become “H” (active) and the data identification signal DATA1becomes “L”. In this case, the output from the AND gate G102 becomes “H”and the output from the NOR gate G103 becomes “L”. As a result, theselected word line WL is supplied with the word line reset voltageVresetwl. Thereafter, when 100 pulses are supplied from the statemachine, the clock count signal CLK100 becomes “L”. Therefore, theoutput from the AND gate G101 becomes “L” and the output from the NORgate G103 becomes “H”. As a result, the selected word line WL issupplied with the recovery voltage.

The column control circuit 2 also includes a similar circuit to thecircuit shown in FIG. 12. In the case of the multiplexer circuit in thecolumn control circuit 2, the input In0 is supplied with the bit lineset voltage Vsetbl (of 0 V, for example) or the bit line reset voltageVresetbl (of 0 V, for example) in accordance with input data.

Thus, data can be written in the memory cell MC connected to theselected word line WL and the selected bit line BL. This data write canbe executed over all the MAT 1 at the same time to complete data writein one page.

In the case of the above embodiment, “0” write takes 100 ns and “1”write takes 1 μs. Therefore, the time required for data write in onepage is 1 μs, which can be made shorter by a processing time of 100 nsthan those in the cases shown in FIGS. 5 and 6.

Verifying at the time of data write is described next. An addition ofverifying to the above writing makes it possible to surely write data.

For example, if input data to a certain MAT 1 is “1”, then “1” iswritten to a selected memory cell MC in the MAT 1, like in the abovecase. Thereafter, the hold data in the selected memory cell MC is readout to confirm whether or not the selected memory cell MC makes atransition to the high-resistance state. If the selected memory cell MCis in the high-resistance state, “1” write has been completed normally.Therefore, the write processing to the memory cell MC of question isterminated. On the other hand, if the selected memory cell MC has madeno transition to the high-resistance state, 1” writing and verifying arerepeated until the resistance state of the selected memory cell MC makesa transition to the high-resistance state.

Also in the case of input data “0”, similarly, “0” writing and verifyingare repeated until the selected memory cell MC makes a transition to thelow-resistance state.

In accordance with the present embodiment, compared with the datawriting method, which comprises resetting memory cells MC uniformlyprior to “0” writing, the length of time required for data writeprocessing can be reduced.

In addition, the memory cells MC contained in one page are spaced fromeach other and accordingly the influence by heat production from thememory cells MC can be relieved at the time of data writing.

Further, adjusting the length of voltage supply time at the time of datawriting by the multiplexer circuit 115 shown in FIG. 12 or verifyingwithin data write processing makes it possible to realize more stabledata write processing.

Second Embodiment

The first embodiment accompanies data writing once at least regardlessof the hold data in the selected memory cell MC. Therefore, even if thehold data is “0”, further “0” write is executed. In this case, thevariable resistive element VR in the memory cell MC is in thelow-resistance state. Accordingly, large current flows therein and maydestruct the memory cell MC and so forth possibly.

Therefore, in the nonvolatile memory according to the second embodiment,data write processing is executed in accordance with a certain procedureshown in FIG. 13.

First, after input data is transferred to the column control circuit 2in each MAT 1 (S301), hold data is previously read out of the selectedmemory cell MC before first writing data (S302).

Next, the read-out hold data is compared with the input data (S303) and,if the result indicates a coincident, the flow terminates withoutwriting data. On the other hand, if the result indicates no coincident,data writing and verifying are repeated until the result indicates acoincident (S304).

The above operation can be executed over all the MATs 1 to complete datawrite in one page.

The present embodiment comprises no data writing when the input data andthe hold data in the selected memory cell MC are both “0”. Therefore, itis possible to avoid the destruction of the memory cell MC and so forthdue to large current caused at that time.

Third Embodiment

The second embodiment comprises no data writing when the input data andthe hold data in the selected memory cell MC are both “0”. If theresistance state of the variable resistive element VR used in the memorycell MC is in the low-resistance state, however, application of thermalenergy higher than the barrier potential makes a transition to athermally stable state at a lower electrochemical potential, that is,the high-resistance state as the property. Therefore, even if the holddata in the memory cell MC is “0”, it may be intended to positivelyoverwrite “0” depending on the case to suppress the transition to thehigh-resistance state.

The following description is therefore given to such a nonvolatilememory that writes “0” and suppresses occurrences of large current atthe same time even if the input data and the hold data in the selectedmemory cell MC are both “0”.

FIG. 14 is a block diagram showing part of a cell array in a nonvolatilememory according to a third embodiment of the present invention.

This nonvolatile memory comprises a current limit function added to thelines in the nonvolatile memories of the first and second embodiments.

There are plural transfer transistors T401, T402, . . . provided betweenthe bit line BL and the column control circuit 3 in the MATs, of whichgates are connected to the output of a current limit circuit 401. Thetransfer transistors T401, T402, . . . are operative to limit thecurrent flowing in the bit line BL and the limit value is controlled bythe current limit circuit 401.

The current limit circuit 401 is a circuit operative to selectivelyapply a limit voltage Vlim1 or Vlim2 to the transfer transistors T401,T402, . . . as a gate voltage. The limit voltage Vlim1 is a voltage,which is selected at the time of normal data writing in which thevariable resistive element VR in the selected memory cell MC makes atransition in the resistance state, and which is a gate voltage forlimiting larger current than the current flowing in the bit line BL atthe time of data writing. On the other hand, the limit voltage Vlim2 isa voltage, which is selected when the hold data in the selected memorycell MC and the input data DIN are both “0”, and which is a much lowerlevel gate voltage than the limit voltage Vlim1 to prevent a flow oflarge current. If the hold data in the selected memory cell MC and theinput data DIN are both “1”, the variable resistive element VR in thememory cell MC is kept in the high-resistance state. Accordingly, thereis no need for imposing a current limitation.

In accordance with the present embodiment, even if the input data DINand the hold data in the selected memory cell MC are both “0”, it ispossible to write “0” in the selected memory cell MC without a flow oflarge current. Further, in accordance with the relation between theinput data DIN and the hold data in the selected memory cell MC, it ispossible to appropriately impose a current limitation and accordinglyreduce power consumption together.

Fourth Embodiment

In the first through third embodiments, the diode Di is used as thenon-ohmic element NO in the memory cell MC and accordingly it canperform the unipolar operation that allows current to flow only from theword line WL toward the bit line BL. These embodiments are, though, alsoapplicable to nonvolatile memories that perform the bipolar operation.

FIGS. 15A and 15B are diagrams of operating waveforms in each MAT 1 atthe time of “0” write and at the time of “1” write in a nonvolatilememory according to a fourth embodiment of the present invention. FIGS.16A and 16B are diagrams showing circuits in the MAT 1 and voltagessupplied to the word line WL and the bit line BL at the time of “0”write and at the time of “1” write in the same embodiment.

A memory cell MC′ includes a capacitor C used as the non-ohmic elementNO. Available examples of the capacitor C include an MIM capacitor andan SIS capacitor.

When “0” is written in a memory cell MC′1 surrounded by the dotted linein FIG. 16A, a word line WL1 and a bit line BL1 connected to the memorycell MC′1 are supplied with a word line set voltage Vsetwl (of 3 V, forexample) and a bit line set voltage Vsetbl (of 0 V, for example),respectively. In this case, the word line set voltage Vsetwl and the bitline set voltage Vsetbl are set to have a potential difference requiredfor changing the variable resistive element VR to the low-resistancestate. On the other hand, word lines WL and bit lines BL connected toother memory cells MC′ are supplied with a word line non-selectionvoltage Vnswl (of 1 V, for example) and a bit line non-selection voltageVnsbl (of 2 V, for example), respectively. In this case, in relationswith both the bit line set voltage Vsetbl and the bit line non-selectionvoltage Vnsbl, the word line non-selection voltage Vnswl is set to havea potential difference of such the extent that the variable resistiveelement VR in the memory cell MC′ makes no transition in the resistancestate. Similarly, in relations with both the word line set voltageVsetwl and the word line non-selection voltage Vnswl, the bit linenon-selection voltage Vnsbl is set to have a potential difference ofsuch the extent that the variable resistive element VR in the memorycell MC′ makes no transition in the resistance state. As a result, theselected memory cell MC′1 makes a transition to the low-resistance statewhile other memory cells MC make no transition in the resistance state.Thus, “0” can be written in only the memory cell MC′1.

When “1” is written in the memory cell MC′1 surrounded by the dottedline in FIG. 16B, the word line WL1 and the bit line BL1 connected tothe memory cell MC′1 are supplied with a word line reset voltageVresetwl (of −3 V, for example) and a bit line reset voltage Vresetbl(of 0 V, for example), respectively. In this case, the word line resetvoltage Vresetwl and the bit line reset voltage Vresetbl are set to havea potential difference required for changing the variable resistiveelement VR to the high-resistance state. On the other hand, word linesWL and bit lines BL connected to other memory cells MC′ are suppliedwith a word line non-selection voltage Vnswl (of −1 V, for example) anda bit line non-selection voltage Vnsbl (of −2 V, for example),respectively. In this case, the word line non-selection voltage Vnswland the bit line non-selection voltage are similarly set as is at thetime of “0” write. As a result, the selected memory cell MC′1 makes atransition to the high-resistance state while other memory cells MC makeno transition in the resistance state. Thus, “1” can be written in onlythe memory cell MC′1.

The present embodiment also exerts the same effects as those in thefirst through third embodiments. Further, the voltage of the oppositepolarity to that in “0” writing is supplied to the variable resistiveelement VR in the memory cell MC′ for “1” writing. Therefore, it ispossible to execute “1” writing in a similar length of time to that for“0” writing. Therefore, compared with the data write processing with theunipolar operation in the first through third embodiments, much fasterdata write processing can be executed.

Fifth Embodiment

FIGS. 17A and 17B are diagrams of operating waveforms in each MAT 1 atthe time of “0” write and at the time of “1” write in a nonvolatilememory according to a fifth embodiment of the present invention. FIG. 18is a diagram showing a circuit in the MAT 1 and voltages supplied tolines at the time of “1” write in the same embodiment.

In the case of the present embodiment, “0” writing is similar to that inthe fourth embodiment.

The following description is given to the case where “1” is written inthe memory cell MC′1 surrounded by the dotted line in FIG. 18. In thiscase, the voltages supplied to the selected word line WL1 andnon-selected word lines WL and the voltages supplied to the selected bitline BL1 and non-selected bit lines BL at the time of “0” writing aremutually interchanged and supplied. In a word, the selected word lineWL1 is supplied with a word line reset voltage Vresetwl of 0 V, andnon-selected word lines WL with a word line non-selection voltage Vnswlof 2 V. In addition, the selected bit line BL1 is supplied with a bitline reset voltage Vresetbl of 3 V, and non-selected bit lines BL with abit line non-selection voltage Vnsbl of 1 V, respectively. As a result,the selected memory cell MC′1 makes a transition to the high-resistancestate while other memory cells MC make no transition in the resistancestate. Thus, “1” can be written in only the memory cell MC′1.

Thus, in the present embodiment, voltages supplied to word lines WL andbit lines BL are interchanged mutually in accordance with input data toexert the similar effect to that in the fourth embodiment as well.

[Others]

Nonvolatile memories, particularly resistance variable memories havebeen described above though the first through third embodiments are alsoapplicable to other semiconductor memory devices.

1. A nonvolatile semiconductor memory device, comprising: a cell arrayincluding plural MATs (unit cell arrays) arranged in matrix, each MATcontaining a plurality of first lines, a plurality of second linesintersecting said plurality of first lines, and a plurality of memorycells connected at intersections of said first and second lines betweenboth lines, each memory cell containing an electrically erasableprogrammable variable resistive element of which resistance isnonvolatilely stored as data; and a plurality of write/erase circuitsconnected to said MATs and operative to execute data write or erase tosaid memory cells inside said MATs in accordance with input data,wherein a part of said plurality of write/erase circuits writes data tomemory cells inside a corresponding MAT while another part of saidplurality of write/erase circuits erases data from memory cells inside acorresponding MAT at the same time.
 2. The nonvolatile semiconductormemory device according to claim 1, further comprising a pulse generatoroperative to generate a write voltage for data write and an erasevoltage for data erase at the same time, wherein said write/erasecircuit includes a selection circuit operative to receive said writevoltage and said erase voltage from said pulse generator, select fromamong these voltages in accordance with input data, and transfer theselected voltage to said first line or said second line.
 3. Thenonvolatile semiconductor memory device according to claim 2, whereinsaid selection circuit selects said write voltage or said erase voltageonly for the application time thereof and transfers the selected voltageto said first line or said second line, and besides selects a recoveryvoltage and transfers it to said first line or said second line.
 4. Thenonvolatile semiconductor memory device according to claim 2, whereinsaid write/erase circuit, until hold data in a selected one of saidmemory cells matches said input data, repeats write/erase and verify tosaid selected memory cell.
 5. The nonvolatile semiconductor memorydevice according to claim 1, wherein said write/erase circuit reads holddata in a selected one of said memory cells, receives input data, andmakes no access to a corresponding MAT if said hold data is equal toinput data.
 6. The nonvolatile semiconductor memory device according toclaim 1, further comprising a current limit circuit operative to limitthe value of current flowing in said memory cell if said input data iswrite data.
 7. The nonvolatile semiconductor memory device according toclaim 1, wherein said memory cell includes a non-ohmic element seriallyconnected to said variable resistive element, said non-ohmic element isa diode.
 8. The nonvolatile semiconductor memory device according toclaim 1, wherein said memory cell includes a non-ohmic element seriallyconnected to said variable resistive element, said non-ohmic element isa capacitor.
 9. The nonvolatile semiconductor memory device according toclaim 8, wherein said write/erase circuit applies a voltage to aselected one of said memory cells, said voltage having the oppositepolarity at the time of data write to that at the time of data erase.10. The nonvolatile semiconductor memory device according to claim 8,wherein said write/erase circuit interchanges the voltages supplied tosaid first and second lines at the time of data write in contrast tothose at the time of data erase for a selected one of said memory cells.11. A nonvolatile semiconductor memory device, comprising: a cell arrayincluding Nm MATs (unit cell arrays) (Nm=an integer of 1 or more)arranged in matrix, each MAT containing Na first lines (Na=an integer of1 or more), Nb second lines (Nb=an integer of 1 or more) intersectingsaid Na first lines, and a plurality of memory cells connected atintersections of said first and second lines between both lines, eachmemory cell containing a serial circuit of an electrically erasableprogrammable variable resistive element of which resistance isnonvolatilely stored as data and a non-ohmic element; and a plurality ofwrite/erase circuits connected to said MATs and operative to executedata write or erase to said memory cells inside said MATs in accordancewith input data, wherein a memory cell connected to an a-th first line(a=an integer of 1 to Na) and a b-th second line (b=an integer of 1 toNb) in an m-th one of said MATs (m=an integer of 1 to Nm) has a logicaladdress i={(a−1)Nb+(b−1)}Nm+(m−1), at the time of data write/erase to aj-th page (j=an integer of 1 to Na×Nb) composed of Nm memory cellshaving logical addresses Nm(j−1) through Nm(j−1)+(Nm−1), an m1-th one ofsaid write/erase circuits (m1=an integer of 1 to Nm) writes data to saidmemory cell having the logical address Nm(j−1)+(m1−1) while an m2-th oneof said write/erase circuits (m2=an integer of 1 to Nm except m1) erasesdata from said memory cell having the logical address Nm(j−1)+(m2−1) atthe same time.
 12. The nonvolatile semiconductor memory device accordingto claim 11, further comprising a pulse generator operative to generatea write voltage for data write and an erase voltage for data erase atthe same time, wherein said write/erase circuit includes a selectioncircuit operative to receive said write voltage and said erase voltagefrom said pulse generator, select from among these voltages inaccordance with input data, and transfer the selected voltage to saidfirst line or said second line.
 13. The nonvolatile semiconductor memorydevice according to claim 12, wherein said selection circuit selectssaid write voltage or said erase voltage only for the application timethereof and transfers the selected voltage to said first line or saidsecond line, and besides selects a recovery voltage and transfers it tosaid first line or said second line.
 14. The nonvolatile semiconductormemory device according to claim 11, wherein said write/erase circuitreads hold data in a selected one of said memory cells, receives inputdata, and makes no access to a corresponding MAT if said hold data isequal to input data.
 15. The nonvolatile semiconductor memory deviceaccording to claim 11, further comprising a current limit circuitoperative to limit the value of current flowing in said memory cell ifsaid input data is write data.
 16. A nonvolatile semiconductor memorydevice, comprising: a cell array including a plurality of first lines, aplurality of second lines intersecting said plurality of first lines,and a plurality of memory cells arranged in matrix and connected atintersections of said first and second lines between both lines, eachmemory cell containing a serial circuit of an electrically erasableprogrammable variable resistive element of which resistance isnonvolatilely stored as data and a non-ohmic element; and a plurality ofwrite/erase circuits operative to execute data write or erase to saidmemory cells in accordance with input data, wherein a certain one ofsaid write/erase circuits writes data to a certain one of said memorycells while another one of said write/erase circuits erases data fromanother one of said memory cells physically separated from said certainmemory cells at the same time.
 17. The nonvolatile semiconductor memorydevice according to claim 16, further comprising a pulse generatoroperative to generate a write voltage for data write and an erasevoltage for data erase at the same time, wherein said write/erasecircuit includes a selection circuit operative to receive said writevoltage and said erase voltage from said pulse generator, select fromamong these voltages in accordance with input data, and transfer theselected voltage to said first line or said second line.
 18. Thenonvolatile semiconductor memory device according to claim 17, whereinsaid selection circuit selects said write voltage or said erase voltageonly for the application time thereof and transfers the selected voltageto said first line or said second line, and besides selects a recoveryvoltage and transfers it to said first line or said second line.
 19. Thenonvolatile semiconductor memory device according to claim 16, whereinsaid write/erase circuit reads hold data in a selected one of saidmemory cells, receives input data, and makes no access to acorresponding MAT if said hold data is equal to input data.
 20. Thenonvolatile semiconductor memory device according to claim 16, furthercomprising a current limit circuit operative to limit the value ofcurrent flowing in said memory cell if said input data is write data.